The main aim of the paper is damage detection at the microscale in the anisotropic piezoelectric sensors using surface acoustic waves (SAWs). A novel technique based on the single input and multiple output of Rayleigh waves is proposed to detect the microscale cracks/flaws in the sensor. A convex-shaped interdigital transducer is fabricated for excitation of divergent SAWs in the sensor. https://jalyttlers.shop/product-category/corner-tv-unit/