This research aims to replace ball joints of beam-structure electrostatic chucks (BSESC). which are limited by issues such as structural friction and inconsistent operation. thus enhancing the applicability in industrial settings. Torsion springs are used as rotational degree-of-freedom (RDOF) mechanisms at the tip of BSESCs to reduce friction and improve repeatability. https://allfixelectricales.shop/product-category/pump-drive-belt/